Ultra-Pure Semiconductor
Sealing Solutions
Mission-critical sealing for plasma chambers, etching equipment, and CVD systems. Our FFKM solutions ensure zero contamination with ultra-pure materials validated by the world's leading semiconductor manufacturers.
Plasma Chamber Cross-Section
Semiconductor Manufacturing Applications
From front-end processing to back-end packaging, our sealing solutions enable the precision and purity required for advanced semiconductor manufacturing.
Plasma Processing Equipment
Critical sealing for plasma etching chambers, RIE systems, and PECVD equipment where aggressive plasma environments demand ultimate material performance.
CVD & Deposition Systems
Ultra-pure sealing for chemical vapor deposition, atomic layer deposition, and sputtering systems requiring contamination-free processing.
Lithography & Metrology
Precision sealing for lithography steppers, immersion systems, and metrology equipment where dimensional stability is critical.
Supported Equipment Types
Etching Equipment
Deposition Tools
Thermal Processing
Analytical Equipment
Advanced Materials Technology
Our semiconductor-grade FFKM materials are engineered specifically for the demanding requirements of leading-edge chip manufacturing.
Semiconductor-Grade Material Properties
Validated by Fortune 500 semiconductor manufacturers
| Property | Test Method | Kalrez 6375 | Kalrez 7075 | Kalrez 8575 |
|---|---|---|---|---|
| Extractables (DI Water) | SEMI F57 | < 5 ppb | < 3 ppb | < 1 ppb |
| Particle Generation | IEST-RP-CC001 | Class 10 | Class 1 | Class 1 |
| Plasma Resistance (CF₄) | ASTM F1058 | Excellent | Superior | Ultimate |
| Temperature Range | Continuous Service | -15°F to 600°F | -40°F to 550°F | -65°F to 500°F |
| Metal Content (Al, Na, K) | ICP-MS | < 10 ppb each | < 5 ppb each | < 1 ppb each |
Plasma Gas Compatibility
Contamination Control
Metal Contamination (ppb)
Particle Performance
Semiconductor ROI Analysis
Quantify the business impact of superior sealing performance in your semiconductor manufacturing operations.
Cost Impact Calculator
Annual Cost Analysis
Current State (Standard FKM)
With FFKM Upgrade
Annual Savings
Get Your Semiconductor Sealing Quote
Our semiconductor specialists understand your critical requirements. Get a detailed technical proposal with material certifications and contamination analysis within 24 hours.
Technical Requirements
Your Quote Package Includes
Material Certification Package
Complete extractables analysis, contamination reports, and SEMI standard compliance documentation.
24-Hour Technical Response
Priority handling by our semiconductor specialists with detailed material recommendations.
ROI Cost Analysis
Detailed downtime cost analysis showing potential savings from seal reliability improvements.
Free Evaluation Samples
Qualified samples for testing in your equipment with full technical support.